Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9844804 | Light collector mirror carrier | Michael Varga, Alexander I. Ershov, Robert L. Morse | 2017-12-19 |
| 9776218 | Controlled fluid flow for cleaning an optical element | Chunguang Xia, Gregory J. Wilson, Brandon Wilson Verhoff | 2017-10-03 |
| 9632418 | Target material supply apparatus for an extreme ultraviolet light source | Georgiy O. Vaschenko, Peter Michael Baumgart, Norbert Bowering | 2017-04-25 |
| 9557650 | Transport system for an extreme ultraviolet light source | Alexander I. Ershov, Brandon Wilson Verhoff, Gregory J. Wilson, Bruno La Fontaine | 2017-01-31 |
| 9560730 | Transport system for an extreme ultraviolet light source | Alexander I. Ershov, Brandon Wilson Verhoff, Gregory J. Wilson, Bruno La Fontaine | 2017-01-31 |