Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9699876 | Method of and apparatus for supply and recovery of target material | Georgiy O. Vaschenko, Jeffrey Gacutan, Martin Algots, Theodosios Syrpis, Chirag Rajyaguru +1 more | 2017-07-04 | |
| 9632418 | Target material supply apparatus for an extreme ultraviolet light source | Silvia De Dea, Georgiy O. Vaschenko, Norbert Bowering | 2017-04-25 | $3,723,000 |
| 9544983 | Apparatus for and method of supplying target material | Chirag Rajyaguru, John M. Algots, Tetsuya Ishikawa | 2017-01-10 | $5,681,000 |