Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9699876 | Method of and apparatus for supply and recovery of target material | Peter Michael Baumgart, Jeffrey Gacutan, Martin Algots, Theodosios Syrpis, Chirag Rajyaguru +1 more | 2017-07-04 |
| 9632418 | Target material supply apparatus for an extreme ultraviolet light source | Silvia De Dea, Peter Michael Baumgart, Norbert Bowering | 2017-04-25 |