Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9735535 | Drive laser for EUV light source | Alexander I. Ershov, Jerzy Hoffman, Igor V. Fomenkov | 2017-08-15 | $16,168,000 |
| 9632418 | Target material supply apparatus for an extreme ultraviolet light source | Silvia De Dea, Georgiy O. Vaschenko, Peter Michael Baumgart | 2017-04-25 | $3,723,000 |