Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9735535 | Drive laser for EUV light source | Alexander I. Ershov, Jerzy Hoffman, Igor V. Fomenkov | 2017-08-15 |
| 9632418 | Target material supply apparatus for an extreme ultraviolet light source | Silvia De Dea, Georgiy O. Vaschenko, Peter Michael Baumgart | 2017-04-25 |