Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9557650 | Transport system for an extreme ultraviolet light source | Silvia De Dea, Alexander I. Ershov, Brandon Wilson Verhoff, Gregory J. Wilson | 2017-01-31 |
| 9560730 | Transport system for an extreme ultraviolet light source | Silvia De Dea, Alexander I. Ershov, Brandon Wilson Verhoff, Gregory J. Wilson | 2017-01-31 |