Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9776218 | Controlled fluid flow for cleaning an optical element | Silvia De Dea, Chunguang Xia, Gregory J. Wilson | 2017-10-03 |
| 9557650 | Transport system for an extreme ultraviolet light source | Silvia De Dea, Alexander I. Ershov, Gregory J. Wilson, Bruno La Fontaine | 2017-01-31 |
| 9560730 | Transport system for an extreme ultraviolet light source | Silvia De Dea, Alexander I. Ershov, Gregory J. Wilson, Bruno La Fontaine | 2017-01-31 |