Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9690213 | Linear Stage for reflective electron beam lithography | Upendra Ummethala, Joshua Randall Clyne, Samir Nayfeh, Mark Williams, Joseph A. Di Regolo +1 more | 2017-06-27 |
| 9544984 | System and method for generation of extreme ultraviolet light | Alexander N. Bykanov, Oleg Khodykin, Daniel Wack, Konstantin Tsigutkin, Joseph F. Walsh +3 more | 2017-01-10 |