Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9690213 | Linear Stage for reflective electron beam lithography | Upendra Ummethala, Layton Hale, Joshua Randall Clyne, Samir Nayfeh, Mark Williams +1 more | 2017-06-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9690213 | Linear Stage for reflective electron beam lithography | Upendra Ummethala, Layton Hale, Joshua Randall Clyne, Samir Nayfeh, Mark Williams +1 more | 2017-06-27 |