Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9844394 | Instrument port for minimally invasive cardiac surgery | Christopher DiBiasio, Keith Durand, Jonathan Hopkins, Zach Traina, Alexander H. Slocum +2 more | 2017-12-19 |
| 9766557 | Patterning device support, lithographic apparatus, and method of controlling patterning device temperature | Earl William Ebert, Johannes Onvlee, Mark Josef Schuster, Peter A. Delmastro, Christopher Charles Ward +5 more | 2017-09-19 |
| 9690213 | Linear Stage for reflective electron beam lithography | Upendra Ummethala, Layton Hale, Joshua Randall Clyne, Mark Williams, Joseph A. Di Regolo +1 more | 2017-06-27 |
| 9632433 | Patterning device support, lithographic apparatus, and method of controlling patterning device temperature | Earl William Ebert, Johannes Onvlee, Mark Josef Schuster, Peter A. Delmastro, Christopher Charles Ward +5 more | 2017-04-25 |
| 9632434 | Reticle cooling system in a lithographic apparatus | Earl William Ebert, Johannes Onvlee, Mark Josef Schuster, Peter A. Delmastro, Christopher Charles Ward +6 more | 2017-04-25 |