Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9766557 | Patterning device support, lithographic apparatus, and method of controlling patterning device temperature | Earl William Ebert, Samir Nayfeh, Mark Josef Schuster, Peter A. Delmastro, Christopher Charles Ward +5 more | 2017-09-19 |
| 9696633 | Substrate handling apparatus and lithographic apparatus | Robert-Han Munnig Schmidt | 2017-07-04 |
| 9645502 | Lithographic apparatus, programmable patterning device and lithographic method | Pieter Willem Herman De Jager, Vadim Yevgenyevich Banine, Lucas Henricus Johannes Stevens, Sander Frederik Wuister, Nikolay Nikolaevich Iosad | 2017-05-09 |
| 9632433 | Patterning device support, lithographic apparatus, and method of controlling patterning device temperature | Earl William Ebert, Samir Nayfeh, Mark Josef Schuster, Peter A. Delmastro, Christopher Charles Ward +5 more | 2017-04-25 |
| 9632434 | Reticle cooling system in a lithographic apparatus | Earl William Ebert, Samir Nayfeh, Mark Josef Schuster, Peter A. Delmastro, Christopher Charles Ward +6 more | 2017-04-25 |