Vadim Yevgenyevich Banine

Issued Patents 2017

Showing 1–7 of 7 patents

Patent #	Title	Co-Inventors	Date
9823572	Lithographic method	Andrey Nikipelov, Olav Waldemar Vladimir Frijns, Gosse Charles De Vries, Erik Roelof Loopstra, Pieter Willem Herman De Jager +8 more	2017-11-21
9726989	Spectral purity filter	Wouter Anthon Soer, Erik Roelof Loopstra, Andrei Mikhailovich Yakunin, Martin Jacobus Johan Jak	2017-08-08
9728931	Electron injector and free electron laser	Andrey Nikipelov, Pieter Willem Herman De Jager, Gosse Charles De Vries, Olav Waldemar Vladimir Frijns, Leonardus Adrianus Gerardus Grimminck +7 more	2017-08-08
9645502	Lithographic apparatus, programmable patterning device and lithographic method	Pieter Willem Herman De Jager, Johannes Onvlee, Lucas Henricus Johannes Stevens, Sander Frederik Wuister, Nikolay Nikolaevich Iosad	2017-05-09
9632419	Radiation source	Jan Bernard Plechelmus Van Schoot, Olav Waldemar Vladimir Frijns, Hermanus Johannes Maria Kreuwel, Johannes Hubertus Josephina Moors, Uwe Stamm +3 more	2017-04-25
9606445	Lithographic apparatus and method of manufacturing a device	Arthur Winfried Eduardus Minnaert, Marcel Johannus Elisabeth Hubertus Muitjens, Andrei Mikhailovich Yakunin, Luigi Scaccabarozzi, Hans Joerg Mallmann +8 more	2017-03-28
9594306	Lithographic apparatus, spectral purity filter and device manufacturing method	Wilhelmus Petrus De Boeij, Antonius Johannes Josephus Van Dijsseldonk, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot +2 more	2017-03-14