Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9606445 | Lithographic apparatus and method of manufacturing a device | Vadim Yevgenyevich Banine, Arthur Winfried Eduardus Minnaert, Andrei Mikhailovich Yakunin, Luigi Scaccabarozzi, Hans Joerg Mallmann +8 more | 2017-03-28 |