Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9606445 | Lithographic apparatus and method of manufacturing a device | Vadim Yevgenyevich Banine, Arthur Winfried Eduardus Minnaert, Marcel Johannus Elisabeth Hubertus Muitjens, Andrei Mikhailovich Yakunin, Hans Joerg Mallmann +8 more | 2017-03-28 |
| 9563137 | Lithographic apparatus and device manufacturing method | Nicolaas Arnoldus Lammers | 2017-02-07 |