Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9726989 | Spectral purity filter | Wouter Anthon Soer, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Martin Jacobus Johan Jak | 2017-08-08 |
| 9632419 | Radiation source | Jan Bernard Plechelmus Van Schoot, Vadim Yevgenyevich Banine, Olav Waldemar Vladimir Frijns, Hermanus Johannes Maria Kreuwel, Johannes Hubertus Josephina Moors +3 more | 2017-04-25 |
| 9606445 | Lithographic apparatus and method of manufacturing a device | Vadim Yevgenyevich Banine, Arthur Winfried Eduardus Minnaert, Marcel Johannus Elisabeth Hubertus Muitjens, Luigi Scaccabarozzi, Hans Joerg Mallmann +8 more | 2017-03-28 |
| 9594306 | Lithographic apparatus, spectral purity filter and device manufacturing method | Vadim Yevgenyevich Banine, Wilhelmus Petrus De Boeij, Antonius Johannes Josephus Van Dijsseldonk, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors +2 more | 2017-03-14 |