Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9594306 | Lithographic apparatus, spectral purity filter and device manufacturing method | Vadim Yevgenyevich Banine, Antonius Johannes Josephus Van Dijsseldonk, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot +2 more | 2017-03-14 |