Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9835950 | Radiation source | Markus Franciscus Antonius Eurlings, Niek Antonius Jacobus Maria Kleemans, Ramon Mark Hofstra, Oscar Franciscus Jozephus Noordman, Tien Nang Pham +3 more | 2017-12-05 |
| 9594306 | Lithographic apparatus, spectral purity filter and device manufacturing method | Vadim Yevgenyevich Banine, Wilhelmus Petrus De Boeij, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot +2 more | 2017-03-14 |