Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9811003 | Metrology method and apparatus, substrate, lithographic system and device manufacturing method | Armand Eugene Albert Koolen, Hendrik Jan Hidde Smilde | 2017-11-07 |
| 9805666 | Liquid crystal display system and method | Jurgen Jean Louis Hoppenbrouwers, Wilhelmus Henricus Maria Van Beek | 2017-10-31 |
| 9753296 | Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing method | Gerbrand Van Der Zouw, Martin Ebert | 2017-09-05 |
| 9726989 | Spectral purity filter | Wouter Anthon Soer, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Andrei Mikhailovich Yakunin | 2017-08-08 |
| 9633427 | Method of measuring a property of a target structure, inspection apparatus, lithographic system and device manufacturing method | Murat Bozkurt, Patricius Aloysius Jacobus Tinnemans | 2017-04-25 |
| 9535338 | Metrology method and apparatus, substrate, lithographic system and device manufacturing method | Armand Eugene Albert Koolen, Hendrik Jan Hidde Smilde | 2017-01-03 |