Issued Patents 2017
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846368 | Lithographic apparatus and device manufacturing method utilizing data filtering | Johannes Jacobus Matheus Baselmans | 2017-12-19 |
| 9778025 | Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method | Simon Gijsbert Josephus Mathijssen, Erik Willem Bogaart, Arie Jeffrey Den Boef | 2017-10-03 |
| 9778575 | Lithographic apparatus and method | Heine Melle Mulder, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Van Greevenbroek +2 more | 2017-10-03 |
| 9753380 | Lithographic apparatus and device manufacturing method | Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net +4 more | 2017-09-05 |
| 9696636 | Lithographic apparatus, device manufacturing method and computer program | Arno Jan Bleeker, Erik Roelof Loopstra | 2017-07-04 |
| 9633427 | Method of measuring a property of a target structure, inspection apparatus, lithographic system and device manufacturing method | Murat Bozkurt, Martin Jacobus Johan Jak | 2017-04-25 |
| 9568831 | Lithographic apparatus and device manufacturing method | Arno Jan Bleeker | 2017-02-14 |
| 9547241 | Alignment sensor, lithographic apparatus and alignment method | Arie Jeffrey Den Boef, Simon Gijsbert Josephus Mathijssen | 2017-01-17 |