Issued Patents 2017
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9835954 | Inspection method and apparatus, substrates for use therein and device manufacturing method | Erik Willem Bogaart, Franciscus Godefridus Casper Bijnen, Simon Gijsbert Josephus Mathijssen | 2017-12-05 |
| 9778025 | Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method | Simon Gijsbert Josephus Mathijssen, Erik Willem Bogaart, Patricius Aloysius Jacobus Tinnemans | 2017-10-03 |
| 9704810 | Method and apparatus for determining an overlay error | — | 2017-07-11 |
| 9658528 | Imprint lithography | Yvonne Wendela Kruijt-Stegeman, Andre Bernardus Jeunink | 2017-05-23 |
| 9632039 | Inspection apparatus, inspection method and manufacturing method | Simon Gijsbert Josephus Mathijssen, Nitesh Pandey, Stefan Michiel Witte, Kjeld Sijbrand Eduard Eikema | 2017-04-25 |
| 9625811 | Imprint lithography | Sander Frederik Wuister, Yvonne Wendela Kruijt-Stegeman | 2017-04-18 |
| 9606442 | Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method | Simon Gijsbert Josephus Mathijssen | 2017-03-28 |
| 9605947 | Position measurement with illumination profile having regions confined to peripheral portion of pupil | Justin Kreuzer, Simon Josephus Mathijssen | 2017-03-28 |
| 9551939 | Mark position measuring apparatus and method, lithographic apparatus and device manufacturing method | Simon Gijsbert Josephus Mathijssen, Stanley Drazkiewicz, Justin Kreuzer, Gerrit Johannes Nijmeijer | 2017-01-24 |
| 9547241 | Alignment sensor, lithographic apparatus and alignment method | Simon Gijsbert Josephus Mathijssen, Patricius Aloysius Jacobus Tinnemans | 2017-01-17 |
| 9541843 | Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid | Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more | 2017-01-10 |
| 9535322 | Imprint lithography | Andre Bernardus Jeunink, Sander Frederik Wuister, Yvonne Wendela Kruijt-Stegeman | 2017-01-03 |