Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9804509 | Lithographic apparatus and device manufacturing method | Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Arjen Boogaard | 2017-10-31 |
| 9740107 | Lithographic apparatus and device manufacturing method | Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +9 more | 2017-08-22 |
| 9594308 | Lithographic apparatus and device manufacturing method | Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Arjen Boogaard | 2017-03-14 |
| 9568841 | Lithographic apparatus and device manufacturing method | Marcus Adrianus Van De Kerkhof, Mark Kroon, Kees Van Weert | 2017-02-14 |
| 9541843 | Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid | Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Klaus Simon +16 more | 2017-01-10 |