Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9541843 | Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid | Joeri Lof, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers, Klaus Simon +16 more | 2017-01-10 |