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Vibration isolator with displacement structure |
Jeroen Lodevicus Gerardus Janssen, Johannes Jacobus Hubertus Paulides, Elena Andreevna Lomonova, Dave Theodorus Everardus Henricus Van Casteren |
2017-09-05 |
| 9753381 |
Substrate table system, lithographic apparatus and substrate table swapping method |
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Antonius Franciscus Johannes De Groot, Christiaan Alexander Hoogendam, Erik Roelof Loopstra |
2017-09-05 |
| 9746312 |
Lithographic apparatus and method for measuring a position |
Engelbertus Antonius Fransiscus Van Der Pasch |
2017-08-29 |
| 9740107 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +9 more |
2017-08-22 |
| 9726988 |
Multi-stage system, a control method therefor, and a lithographic apparatus |
Johannes Petrus Martinus Bernardus Vermeulen |
2017-08-08 |
| 9715171 |
Imprint lithographic apparatus and imprint lithographic method |
Johannes Petrus Martinus Bernardus Vermeulen, Marc Wilhelmus Maria Van Der Wijst, Jeroen Pieter Starreveld, Cornelius Adrianus Lambertus De Hoon, Francois Xavier Debiesme |
2017-07-25 |
| 9696630 |
Lithographic apparatus and device manufacturing method |
Marc Wilhelmus Maria Van Der Wijst, Erik Roelof Loopstra, Bernhard Geuppert, Marco Hendrikus Hermanus Oude Nijhuis, Rodolfo Guglielmi Rabe +2 more |
2017-07-04 |
| 9671702 |
Positioning system, a lithographic apparatus and a method for positional control |
Henrikus Herman Marie Cox |
2017-06-06 |
| 9541843 |
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2017-01-10 |