Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9696630 | Lithographic apparatus and device manufacturing method | Marc Wilhelmus Maria Van Der Wijst, Hans Butler, Erik Roelof Loopstra, Marco Hendrikus Hermanus Oude Nijhuis, Rodolfo Guglielmi Rabe +2 more | 2017-07-04 |
| 9696639 | Projection exposure system for microlithography with a measurement device | Ulrich Mueller, Joachim Stuehler, Oswald Gromer, Rolf Freimann, Paul Kaufmann | 2017-07-04 |
| 9557653 | Optical projection system | Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Martin Mahlmann +2 more | 2017-01-31 |
| 9551944 | Method for replacing objective parts | Guido Limbach, Harald Woelfle, Peter Deufel | 2017-01-24 |