Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9696639 | Projection exposure system for microlithography with a measurement device | Ulrich Mueller, Joachim Stuehler, Rolf Freimann, Paul Kaufmann, Bernhard Geuppert | 2017-07-04 |