Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9720329 | Projection objective of a microlithographic projection exposure apparatus | Hartmut Enkisch, Stephan Muellender, Hans-Juergen Mann | 2017-08-01 |
| 9696639 | Projection exposure system for microlithography with a measurement device | Ulrich Mueller, Joachim Stuehler, Oswald Gromer, Paul Kaufmann, Bernhard Geuppert | 2017-07-04 |
| 9575224 | Mirror, projection objective with such mirror, and projection exposure apparatus for microlithography with such projection objective | Norman Baer, Guido Limbach, Thure Boehm, Gero Wittich | 2017-02-21 |
| 9568394 | Optical device | Heiko Feldmann | 2017-02-14 |