Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9772478 | Catadioptric projection objective with parallel, offset optical axes | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Alexander Epple | 2017-09-26 |
| 9720329 | Projection objective of a microlithographic projection exposure apparatus | Hartmut Enkisch, Stephan Muellender, Rolf Freimann | 2017-08-01 |
| 9639004 | Imaging optics and projection exposure installation for microlithography with an imaging optics | — | 2017-05-02 |
| 9568845 | Mirror for use in a microlithography projection exposure apparatus | Martin Rocktaeschel, Hartmut Enkisch, Franz-Josef Stickel, Oliver Natt, Sascha Migura | 2017-02-14 |
| 9568832 | Anamorphically imaging projection lens system and related optical systems, projection exposure systems and methods | — | 2017-02-14 |
| 9541841 | Imaging optical system and projection exposure installation for microlithography including same | Alexander Epple | 2017-01-10 |
| 9535337 | Imaging optics, microlithography projection exposure apparatus having same and related methods | David Shafer | 2017-01-03 |