Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9772478 | Catadioptric projection objective with parallel, offset optical axes | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann | 2017-09-26 |
| 9726870 | Catadioptric projection objective | Vladimir Kamenov, Toralf Gruner, Thomas Schicketanz | 2017-08-08 |
| 9726979 | Catadioptric projection objective with intermediate images | Aurelian Dodoc, Wilhelm Ulrich | 2017-08-08 |
| 9541841 | Imaging optical system and projection exposure installation for microlithography including same | Hans-Juergen Mann | 2017-01-10 |