Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9733395 | Microlithographic projection exposure apparatus | Daniel Kraehmer, Toralf Gruner, Karl-Stefan Weissenrieder, Heiko Feldmann, Achim Zirkel +3 more | 2017-08-15 |
| 9726870 | Catadioptric projection objective | Alexander Epple, Toralf Gruner, Thomas Schicketanz | 2017-08-08 |