Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9817220 | Catadioptric projection objective comprising deflection mirrors and projection exposure method | Toralf Gruner | 2017-11-14 |
| 9726870 | Catadioptric projection objective | Alexander Epple, Vladimir Kamenov, Toralf Gruner | 2017-08-08 |
| 9639005 | Imaging catoptric EUV projection optical unit | Johannes Ruoff | 2017-05-02 |
| 9581910 | Method of lithographically transferring a pattern on a light sensitive surface and illumination system of a microlithographic projection exposure apparatus | Frank Schlesener, Ingo Saenger, Olaf Dittmann, Aksel Goehnermeier, Alexandra Pazidis +2 more | 2017-02-28 |