Issued Patents 2017
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9835953 | Imaging optical unit for EUV projection lithography | Josef Rapp | 2017-12-05 |
| 9798249 | Method and apparatus for compensating at least one defect of an optical system | Vladimir Dmitriev, Ingo Saenger, Frank Schlesener, Markus Mengel | 2017-10-24 |
| 9785052 | Optical system of a microlithographic projection exposure apparatus and method of reducing image placement errors | Jens Timo Neumann, Joerg Zimmermann, Dirk Hellweg, Dirk Juergens | 2017-10-10 |
| 9678439 | Mirror | Ingo Saenger, Martin Endres, Thomas Eisenmann | 2017-06-13 |
| 9658533 | Arrangement of a mirror | Heiko Feldmann, Michael Layh | 2017-05-23 |
| 9645503 | Collector | Ingo Saenger, Joerg Zimmermann, Daniel Kraehmer, Martin Meier, Frank Schlesener +2 more | 2017-05-09 |
| 9639005 | Imaging catoptric EUV projection optical unit | Thomas Schicketanz | 2017-05-02 |
| 9625827 | Imaging optical unit for EUV projection lithography | Josef Rapp | 2017-04-18 |
| 9551941 | Illumination system for an EUV lithography device and facet mirror therefor | Ingo Saenger, Joerg Zimmermann, Daniel Kraehmer, Christoph Hennerkes, Frank Schlesener | 2017-01-24 |
| 9535332 | Mask for EUV lithography, EUV lithography system and method for optimising the imaging of a mask | Daniel Kraehmer | 2017-01-03 |