Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9798249 | Method and apparatus for compensating at least one defect of an optical system | Ingo Saenger, Frank Schlesener, Markus Mengel, Johannes Ruoff | 2017-10-24 |
| 9753366 | Method and apparatus for the determination of laser correcting tool parameters | — | 2017-09-05 |
| 9658527 | Correction of errors of a photolithographic mask using a joint optimization process | — | 2017-05-23 |
| 9606444 | Method and apparatus for locally deforming an optical element for photolithography | Uri Stern | 2017-03-28 |