Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9606444 | Method and apparatus for locally deforming an optical element for photolithography | Vladimir Dmitriev | 2017-03-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9606444 | Method and apparatus for locally deforming an optical element for photolithography | Vladimir Dmitriev | 2017-03-28 |