Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9754695 | EUV collector | — | 2017-09-05 |
| 9678439 | Mirror | Ingo Saenger, Johannes Ruoff, Thomas Eisenmann | 2017-06-13 |
| 9671608 | Illumination system for EUV lithography | Jens Ossmann | 2017-06-06 |
| 9632422 | Illumination optical unit | — | 2017-04-25 |
| 9588434 | Catoptric illumination system for microlithography tool | Jens Ossmann, Ralf Stuetzle | 2017-03-07 |