Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9690203 | Method for adjusting an illumination setting | Joerg Zimmermann, Paul Graeupner, Olaf Conradi | 2017-06-27 |
| 9588434 | Catoptric illumination system for microlithography tool | Jens Ossmann, Martin Endres | 2017-03-07 |