Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823579 | Optical system and method of use | — | 2017-11-21 |
| 9690203 | Method for adjusting an illumination setting | Joerg Zimmermann, Ralf Stuetzle, Paul Graeupner | 2017-06-27 |
| 9606446 | Reflective optical element for EUV lithography and method of manufacturing a reflective optical element | Norbert Wabra, Boris Bittner, Martin von Hodenberg, Hartmut Enkisch, Stephan Muellender | 2017-03-28 |
| 9581813 | Method for improving the imaging properties of a projection objective, and such a projection objective | Heiko Feldmann, Gerald Richter, Sascha Bleidistel, Andreas Frommeyer, Toralf Gruner +1 more | 2017-02-28 |