Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9733395 | Microlithographic projection exposure apparatus | Vladimir Kamenov, Daniel Kraehmer, Toralf Gruner, Karl-Stefan Weissenrieder, Achim Zirkel +3 more | 2017-08-15 |
| 9658533 | Arrangement of a mirror | Johannes Ruoff, Michael Layh | 2017-05-23 |
| 9651872 | Projection lens with wavefront manipulator | — | 2017-05-16 |
| 9581813 | Method for improving the imaging properties of a projection objective, and such a projection objective | Olaf Conradi, Gerald Richter, Sascha Bleidistel, Andreas Frommeyer, Toralf Gruner +1 more | 2017-02-28 |
| 9568394 | Optical device | Rolf Freimann | 2017-02-14 |