Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9841682 | Arrangement for actuating an element in a microlithographic projection exposure apparatus | Ulrich Schoenhoff, Juergen Fischer | 2017-12-12 |
| 9817322 | Optical imaging device and method for reducing dynamic fluctuations in pressure difference | Stefan Hembacher, Bernhard Gellrich, Jens Kugler | 2017-11-14 |
| 9581813 | Method for improving the imaging properties of a projection objective, and such a projection objective | Olaf Conradi, Heiko Feldmann, Gerald Richter, Andreas Frommeyer, Toralf Gruner +1 more | 2017-02-28 |
| 9568837 | Arrangement for actuating an element in a microlithographic projection exposure apparatus | Ulrich Schoenhoff, Juergen Fischer | 2017-02-14 |
| 9535336 | Microlithographic projection exposure apparatus | Yim-Bun Patrick Kwan, Florian Bach, Daniel Benz, Severin Waldis, Armin Werber | 2017-01-03 |