Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9829808 | Method for controlling a motion of optical elements in lithography systems | Dick Antonius Hendrikus Laro | 2017-11-28 |
| 9766549 | Optical apparatus with adjustable action of force on an optical module | — | 2017-09-19 |
| 9746778 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more | 2017-08-29 |
| 9696630 | Lithographic apparatus and device manufacturing method | Marc Wilhelmus Maria Van Der Wijst, Hans Butler, Erik Roelof Loopstra, Bernhard Geuppert, Marco Hendrikus Hermanus Oude Nijhuis +2 more | 2017-07-04 |
| 9551940 | Lens comprising a plurality of optical element disposed in a housing | — | 2017-01-24 |
| 9535336 | Microlithographic projection exposure apparatus | Sascha Bleidistel, Florian Bach, Daniel Benz, Severin Waldis, Armin Werber | 2017-01-03 |