Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9746778 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Oliver Natt, Gero Wittich, Timo Laufer, Peter Kuerz +7 more | 2017-08-29 |
| 9671703 | Optical arrangement, EUV lithography apparatus and method for configuring an optical arrangement | Norman Baer, Toralf Gruner | 2017-06-06 |