Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9535336 | Microlithographic projection exposure apparatus | Sascha Bleidistel, Yim-Bun Patrick Kwan, Florian Bach, Daniel Benz, Severin Waldis | 2017-01-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9535336 | Microlithographic projection exposure apparatus | Sascha Bleidistel, Yim-Bun Patrick Kwan, Florian Bach, Daniel Benz, Severin Waldis | 2017-01-03 |