Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9817322 | Optical imaging device and method for reducing dynamic fluctuations in pressure difference | Bernhard Gellrich, Jens Kugler, Sascha Bleidistel | 2017-11-14 |
| 9810996 | Optical imaging device with thermal attenuation | Bernhard Gellrich, Jens Kugler, Thomas Ittner, Karl-Heinz Schimitzek, Payam Tayebati +1 more | 2017-11-07 |
| 9766550 | Actuators and microlithography projection exposure systems and methods using the same | Ulrich Weber, Armin Schoeppach | 2017-09-19 |
| 9746778 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more | 2017-08-29 |
| 9696518 | Position manipulator for an optical component | — | 2017-07-04 |