Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9843153 | Beam reverser module and optical power amplifier having such a beam reverser module | Michael Schall, Johannes Kraus, Holger Muenz, Ingrid Schuster, Willi Anderl +3 more | 2017-12-12 |
| 9766550 | Actuators and microlithography projection exposure systems and methods using the same | Stefan Hembacher, Armin Schoeppach | 2017-09-19 |
| 9709895 | Support elements for an optical element | Jens Kugler, Nicolai Wengert | 2017-07-18 |
| 9664873 | Positioning unit and apparatus for adjustment of an optical element | Jens Kugler | 2017-05-30 |