Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9798243 | Optical device having a deformable optical element | Manfred Steinbach | 2017-10-24 |
| 9766550 | Actuators and microlithography projection exposure systems and methods using the same | Ulrich Weber, Stefan Hembacher | 2017-09-19 |
| 9604299 | Method and device for connecting an optical element to a frame | Johnannes Rau, Gennady Fedosenko, Leonid Gorkhover, Gerd Klose, Stefan Wiesner +5 more | 2017-03-28 |
| 9557653 | Optical projection system | Johannes Rau, Bernhard Gellrich, Jens Kugler, Martin Mahlmann, Bernhard Geuppert +2 more | 2017-01-31 |