Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9841682 | Arrangement for actuating an element in a microlithographic projection exposure apparatus | Sascha Bleidistel, Juergen Fischer | 2017-12-12 |
| 9568837 | Arrangement for actuating an element in a microlithographic projection exposure apparatus | Sascha Bleidistel, Juergen Fischer | 2017-02-14 |