Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9778576 | Microlithography illumination system and microlithography illumination optical unit | Damian Fiolka, Michael Totzeck, Hartmut Enkisch | 2017-10-03 |
| 9720329 | Projection objective of a microlithographic projection exposure apparatus | Hartmut Enkisch, Hans-Juergen Mann, Rolf Freimann | 2017-08-01 |
| 9606446 | Reflective optical element for EUV lithography and method of manufacturing a reflective optical element | Norbert Wabra, Boris Bittner, Martin von Hodenberg, Hartmut Enkisch, Olaf Conradi | 2017-03-28 |