Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9778576 | Microlithography illumination system and microlithography illumination optical unit | Damian Fiolka, Michael Totzeck, Stephan Muellender | 2017-10-03 |
| 9720329 | Projection objective of a microlithographic projection exposure apparatus | Stephan Muellender, Hans-Juergen Mann, Rolf Freimann | 2017-08-01 |
| 9606446 | Reflective optical element for EUV lithography and method of manufacturing a reflective optical element | Norbert Wabra, Boris Bittner, Martin von Hodenberg, Stephan Muellender, Olaf Conradi | 2017-03-28 |
| 9568845 | Mirror for use in a microlithography projection exposure apparatus | Martin Rocktaeschel, Franz-Josef Stickel, Oliver Natt, Hans-Juergen Mann, Sascha Migura | 2017-02-14 |