Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9778576 | Microlithography illumination system and microlithography illumination optical unit | Michael Totzeck, Hartmut Enkisch, Stephan Muellender | 2017-10-03 |
| 9588435 | EUV microlithography projection exposure apparatus with a heat light source | — | 2017-03-07 |
| 9581911 | Polarization-modulating optical element | Markus Deguenther | 2017-02-28 |