Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9785052 | Optical system of a microlithographic projection exposure apparatus and method of reducing image placement errors | Johannes Ruoff, Jens Timo Neumann, Dirk Hellweg, Dirk Juergens | 2017-10-10 |
| 9728796 | Fluidic distribution system and related methods | Gerard F. McLean, Jeremy Schrooten, Paul Sobejko | 2017-08-08 |
| 9690203 | Method for adjusting an illumination setting | Ralf Stuetzle, Paul Graeupner, Olaf Conradi | 2017-06-27 |
| 9645503 | Collector | Ingo Saenger, Daniel Kraehmer, Johannes Ruoff, Martin Meier, Frank Schlesener +2 more | 2017-05-09 |
| 9551941 | Illumination system for an EUV lithography device and facet mirror therefor | Johannes Ruoff, Ingo Saenger, Daniel Kraehmer, Christoph Hennerkes, Frank Schlesener | 2017-01-24 |