Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9785052 | Optical system of a microlithographic projection exposure apparatus and method of reducing image placement errors | Johannes Ruoff, Jens Timo Neumann, Joerg Zimmermann, Dirk Juergens | 2017-10-10 |