Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9826201 | Method and measuring machine for determining dimensional properties of a measurement object | Philipp Jester, Frank Widulle | 2017-11-21 |
| 9709902 | Projection exposure tool for microlithography and method for microlithographic imaging | Jochen Hetzler | 2017-07-18 |
| 9581910 | Method of lithographically transferring a pattern on a light sensitive surface and illumination system of a microlithographic projection exposure apparatus | Frank Schlesener, Ingo Saenger, Olaf Dittmann, Alexandra Pazidis, Thomas Schicketanz +2 more | 2017-02-28 |